E13900 - SEMI E139 - レシピとパラメータに関する管理の規定（RaP） StdPbc-0823 This Specification is intended to

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Description

This Specification is intended to be used with the polished wafer specification (SEMI M1)

－この測定法は，サプライヤではプロセスコントロールや出荷検査，ユーザ側では受け入れ検査に使用される。

Short-Term Reproducibility

This Document accomplishes this by defining an operational model for prober equipment as viewed by a factory automation controller

and SEMI F95)

E13900 - SEMI E139 - レシピとパラメータに関する管理の規定（RaP） StdPbc-0823 This Specification is intended to, global Information & Control Committee global Audits and Reviews Subcommitteewww. semiviews. orgwww. semi. org > SEMI E139SEMI E139. 3 Factory Information & Control System: FICS 6: FICS FICS SEMISEMI E40 FICS FICS 77. 13 Subordinate Documents: SEMI E139. 1 0310 XML Schema for the RaP PDE SEMI E139. 2 1108 SECS II Protocol for Recipe and Parameter Management (RaP) SEMI E139. 3 1211 XML SOAP Binding for Recipe and Parameter Management Referenced SEMI

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