S00900 - SEMI S9 - Guide to Electrical Design Verification Tests for Semiconductor Manufacturing Equipment that have Been Moved to SEMI S22 Revision:SEMI S9-0307 (Withdrawn 0211) - Withdrawn SEMI E134-0813 (technical revision)

SEMI E134-0813 (technical revision)

静電気電荷起因の装置動作における問題や付随的に発生する製品欠陥は，半導体製造装置の所有コスト（COO： cost of ownership）へのマイナス要因となるかもしれない（SEMI E35を参照）｡

high accuracy and fidelity to these standard features are necessary

previously published in 1995

This Standard provides a common basis for communication between manufacturers and users regarding testing and describing MFC mounting effects

S00900 - SEMI S9 - Guide to Electrical Design Verification Tests for Semiconductor Manufacturing Equipment that have Been Moved to SEMI S22 Revision:SEMI S9-0307 (Withdrawn 0211) - Withdrawn SEMI E134-0813 (technical revision)The purpose of this document is to provide a permanent withdrawal notice for SEMI S9 indicating that all technical content has been incorporated within SEMI S22. Referenced SEMI Standards SEMI S1 Safety Guideline for Equipment Safety Labels SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S22 Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment