S02900 - SEMI S29 - フッ素系温室効果ガス（F-GHG）排出の特性評価と削減に関するガイド Revision:SEMI S29-0712 - Inactive and completion of automated and

and completion of automated and manual carrier transfers to and from the equipment and

The surface treatment chemistries are different for n- and p-type wafers

1  This Standard encompasses the test methods for antifouling property and resistance to chemical reagents of the FPD polarizing films and its related materials

but also the reticles or mirrors to haze

SEMI P45-0306 (first published)

S02900 - SEMI S29 - フッ素系温室効果ガス（F-GHG）排出の特性評価と削減に関するガイド Revision:SEMI S29-0712 - Inactive and completion of automated andNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Environmental, Health & Safety Global Technical Committee2012618global Audits and Reviews Subcommittee20127www. semiviews. org www. semi. org NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to